Liquid supplying device and photoresist coating equipment
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United States of America Patent
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Oct 16, 2018
Grant Date -
Dec 3, 2015
app pub date -
Sep 25, 2014
filing date -
May 30, 2014
priority date (Note) -
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Abstract
The present invention provides a liquid supplying device and a photoresist coating equipment. The liquid supplying device i A liquid supplying device, comprising: a tank for storing liquid; and a liquid transfer pipe inserted into the tank, and an elastic retractable structure is provided on at least one portion of the liquid transfer pipe, and a pipe end portion of the liquid transfer pipe in the tank is always contacted with and pressed against an inner wall of the tank. In the present invention, the liquid is able to be output continuously, and a problem of the prior art in which the liquid stored in the tank cannot be used sufficiently can be avoided.
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