Microvalve Device and Manufacturing Method Therefor
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United States of America Patent
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Dec 3, 2015
app pub date -
Jan 11, 2013
filing date -
Jan 11, 2013
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Abstract
A microvalve device and a manufacturing method therefore are disclosed. The microvalve device includes a body, including a first layer (7) and at least a second layer (8) forming a chamber (8) with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports (4, 5, 6) in fluid communication with the chamber (9); and piezoelectric actuators (1, 2, 3) corresponding to predetermined fluid ports (4, 5, 6), wherein the piezoelectric actuators (1, 2, 3) are arranged in the chamber (9) and strain extending and retracting directions of the piezoelectric actuators are parallel to the first layer (7), wherein free ends of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting directions are used for shielding the fluid ports (4, 5, 6) so as to control opening/closing states of the fluid ports (4, 5, 6).
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