COMPOSITION HAVING ALKALINE PH AND PROCESS FOR FORMING SUPERCONFORMATION THEREWITH
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United States of America Patent
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Issued Date -
Dec 3, 2015
app pub date -
Jul 29, 2015
filing date -
Jul 20, 2015
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Abstract
A composition includes a solvent; a metal ion disposed in the solvent; an accelerator disposed in the solvent; and a suppressor disposed in the solvent, a pH of the composition being alkaline and effective to form a superconformation comprising a damascene deposit that includes an electrochemically reduced form of the metal ion. A process for forming a superconformation includes: contacting a substrate with a composition, the composition including: a solvent; a metal ion disposed in the solvent; an accelerator disposed in the solvent; and a suppressor disposed in the solvent; controlling a pH of the composition to be alkaline; and producing a damascene deposit on the substrate to form the superconformation, the damascene deposit including an electrochemically reduced form of the metal ion.
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