LASER ANNEALING APPARATUS AND LASER ANNEALING METHOD

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United States of America Patent

SERIAL NO

14725129

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Abstract

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The present invention provides an efficient heat treatment such as activation treatment of impurities on a substrate such as a thick silicon wafer with large heat capacity by laser annealing.

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THE JAPAN STEEL WORKS LTD11 1 OSAKI 1 CHOME SHINAGAWA KU TOKYO 141-0032

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KOBAYASHI, Naoyuki Kanagawa, JP 78 1587
KUDO, Toshio Kanagawa, JP 35 464
SANO, Kazuya Tokyo, JP 7 36
SEINO, Toshiaki Kanagawa, JP 3 15
TOYODA, Mitsuhiro Kanagawa, JP 13 113

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