INSPECTION METHOD OF FLOW SENSOR, INSPECTION SYSTEM AND PROGRAM RECORDING MEDIUM WITH PROGRAM FOR INSPECTION SYSTEM RECORDED THEREON
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United States of America Patent
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Issued Date -
Nov 19, 2015
app pub date -
May 13, 2015
filing date -
May 14, 2014
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Abstract
In order to provide an inspection system of a flow sensor capable of charging an appropriate pressure in a flow path in response to the inspection target flow sensor and significantly reducing a waiting time until a start of an inspection, the inspection system is provided with: fluid resistances respectively provided for a plurality of respective branch flow paths branched in a downstream of an upstream side flow path where the inspection target flow sensor is provided: valves respectively provided for the respective branch flow paths; a fluid sensor having at least a part thereof being provided in an upstream side than each of the fluid resistances for measuring a pressure or a flow rate of the fluid; and a valve opening/closing control part configured to allow a plurality of the valves to be in opened states at the time of inspecting the inspection target flow sensor.
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