METHOD FOR PREPARING SAMPLES FOR IMAGING
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United States of America Patent
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Issued Date -
Nov 19, 2015
app pub date -
Dec 30, 2013
filing date -
Dec 31, 2012
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Abandoned
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Abstract
A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. An ion beam mills exposes a cross section of the work piece using a bulk mill process. A deposition precursor gas is directed to the sample surface while a small amount of material is removed from the exposed cross section face, the deposition precursor producing a more uniform cross section. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.
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