EVAPORATION SOURCE FOR TRANSPORTING CHEMICAL PRECURSORS AND METHOD OF EVAPORATION FOR TRANSPORTING THE SAME WHICH USES SAID SOURCE
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United States of America Patent
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Issued Date -
Nov 19, 2015
app pub date -
Dec 19, 2013
filing date -
Dec 28, 2012
priority date (Note) -
Abandoned
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Abstract
The invention presents an evaporation source for transporting chemical precursors to a substrate on which the latter are deposited by means of condensation, formed by a principal tube (1) which houses the precursors in its lower part, and which has heating means (8). An inlet (5) and an outlet (6) for carrier gases is arranged in the upper part of the principal tube (1), said inlet (5) and outlet (6) being located on the lateral surface (7) of the principal tube (1), opposing each other and aligned along a common line which passes transversally through the lateral surface (7) of the principal tube (1).
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