LIGHT EMITTING DIODE DIGITAL MICROMIRROR DEVICE ILLUMINATOR
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United States of America Patent
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Nov 12, 2015
app pub date -
May 6, 2015
filing date -
May 10, 2014
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Abstract
A light emitting diode (LED) digital micromirror device (DMD) illuminator includes at least one LED die, a non-imaging collection optic and a lens system in optical communication with the output aperture of the non-imaging collection optic. The lens system is telecentric in an object space which includes the output aperture of the non-imaging collection optic. In some embodiments, the lens system is also telecentric in image space. In some configurations, the LED dies are ultraviolet LED dies. The illuminator is configured to project high radiance optical energy onto a DMD. A projection lens can be used to image the DMD onto an illumination plane with high intensity and spatial uniformity. Examples of applications for the illuminator include maskless lithography, ultraviolet curing of materials and structured fluorescence excitation.
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