BAW Gyroscope with Bottom Electrode
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United States of America Patent
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app pub date -
Dec 12, 2013
filing date -
Nov 5, 2010
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Abandoned
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Abstract
A bulk acoustic wave gyroscope has a primary member in a member plane, and an electrode layer in an electrode plane spaced from the member plane. The electrode layer has a first portion that is electrically isolated from a second portion. The first portion, however, is mechanically coupled with the second portion and faces the primary member (e.g., to actuate or sense movement of the primary member). For support, the second portion of the electrode is directly coupled with structure in the member plane.
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