MICROBOLOMETER CONTACT SYSTEMS AND METHODS
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United States of America Patent
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app pub date -
May 19, 2014
filing date -
Oct 9, 2009
priority date (Note) -
Abandoned
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Abstract
Systems and methods are directed to contacts for an infrared detector. For example, an infrared imaging device includes a substrate having a first metal layer and an infrared detector array coupled to the substrate via a plurality of contacts. Each contact includes for an embodiment a second metal layer formed on the first metal layer; a third metal layer formed on the second metal layer, wherein the third metal layer at least partially fills an inner portion of the contact; and a first passivation layer formed on the third metal layer.
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