Apparatus and Method for Sample Preparation
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United States of America Patent
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Issued Date -
Oct 29, 2015
app pub date -
Feb 25, 2015
filing date -
Mar 5, 2014
priority date (Note) -
Abandoned
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Abstract
A sample preparation apparatus (100) is used to prepare a cross section of a sample (S) by irradiating it with an ion beam. The apparatus (100) includes an ion beam generator (10), a shield plate (40) disposed to cover a part of the sample (S) to shield the sample (S) from the ion beam, and a controller (82) controlling the ion beam generator (10). The controller (82) controls performance of first and second operations. In the first operation, the ion beam is accelerated by a first accelerating voltage and hits the sample (S) while the sample (S) and the shield plate (40) are located in a given positional relationship. In the second operation, the ion beam is accelerated by a second accelerating voltage lower than the first accelerating voltage and hits the sample (S) while the given positional relationship is maintained.
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