SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFICATION WITHIN INSPECTION IMAGES
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United States of America Patent
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app pub date -
Jul 6, 2015
filing date -
Dec 21, 2011
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Abandoned
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Abstract
An analysis system capable of classifying possible defects identified within an inspection image of an inspected object includes a storage device and a processor. The processor matches a template and a portion of the inspection image, thus giving rise to a matching portion of the inspection image. The inspection image is captured by an inspection tool. The processor associates, using a mask corresponding to the template and defining one or more segments within the matching portion of the inspection image, a potential defect with a segment defined by the mask and corresponding to a location of the potential defect, and classifies the potential defect in accordance with the segment defined by the mask within the matching portion of the inspection image and associated with the potential defect.
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