SUBSTRATE PROCESSING METHOD
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United States of America Patent
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Issued Date -
Oct 29, 2015
app pub date -
Apr 20, 2015
filing date -
Apr 23, 2014
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Abstract
A substrate processing method which can improve a throughput by simultaneously processing various types of substrates is disclosed. The substrate processing method includes: dividing substrate holders into a first group and a second group; assigning each one of the substrate holders to either a first recipe or a second recipe; calculating a total transporting time in each of all possible transporting orders of transporting substrates and the substrate holders for performing a first process according to the first recipe and a second process according to the second recipe; determining a transporting order that provides a shortest total transporting time; and performing the first process on one or a plurality of substrates using substrate holders belonging to the first group and performing the second process on one or a plurality of substrates using substrate holders belonging to the second group while transporting the substrates according to the determined transporting order.
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