CATALYST ADSORPTION METHOD AND CATALYST ADSORPTION DEVICE

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United States of America Patent

APP PUB NO 20150303103A1
SERIAL NO

14343509

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Abstract

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A catalyst adsorption method can sufficiently adsorb a catalyst to a lower portion of a recess formed in a substrate. A substrate 20 in which a recess 22 is formed is prepared. Then, a catalyst 23 formed of nanoparticles coated with a dispersant is adsorbed to a surface of the substrate 20 by bringing the substrate 20 into contact with a catalyst solution 12 containing the catalyst by a catalyst adsorption device 10. At that time, a high frequency vibration is applied to the catalyst solution 12.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325
A SCHOOL CORPORATION KANSAI UNIVERSITYOSAKA JAPAN OSAKA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arima, Ryohei Osaka, JP 1 1
Inoue, Fumihiro Osaka, JP 38 252
Iwashita, Mitsuaki Nirasaki-shi, Yamanashi, JP 90 1643
Miyake, Hiroshi Osaka, JP 77 1752
Shinguhara, Shoso Osaka, JP 2 1
Tanaka, Takashi Nirasaki-shi, Yamanashi, JP 320 3377

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