PHOTORESIST COMPOSITION AND METHOD OF FABRICATING DISPLAY SUBSTRATE USING THE SAME

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United States of America Patent

SERIAL NO

14503062

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Abstract

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A chemically amplified photoresist composition is provided which includes: a solute including a novolac resin with an acid decomposable protecting group, a photoacid generator, and an organic solvent.

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS (LUXEMBOURG) SARL32-36 BOULEVARD D" AVRANCHES LUXEMBOURG L-1160

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Ki-Hyun Yongin-City, KR 27 103
Chun, Jun Yongin-City, KR 31 64
Ju, Jin-Ho Yongin-City, KR 73 231
Kang, Deok-Man Anseong-si, KR 11 28
Kim, Ji-Hyun Yongin-City, KR 189 1734
Lee, Chang-Ik Anseong-si, KR 4 73
Lee, Jung-Soo Yongin-City, KR 40 155
Oh, Se-Tae Anseong-si, KR 1 6
Park, Jeong-Min Yongin-City, KR 112 1372
Park, Sung-Kyun Yongin-City, KR 19 69

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