SYSTEMS AND METHODS FOR DRY PROCESSING FABRICATION OF BINARY MASKS WITH ARBITRARY SHAPES FOR ULTRA-VIOLET LASER MICROMACHINING
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Jun 17, 2013
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Jun 18, 2012
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Abstract
A system and method for producing binary dry process laser microfabrication masks is disclosed. A laser is focused on a first mask to produce a mask image, the mask image thereafter being reduced by demagnification optics to provide a reduced image. A target is exposed to the reduced image to create features of reduced size from the original mask. The target may be used to form a binary mask capable of withstanding laser radiation power necessary for direct target micromachining. A binary mask may be used to create other binary masks in an iterative process to provide binary masks with successively smaller features based on the image reduction due to the demagnification optics.
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