System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing

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United States of America Patent

PATENT NO 9506947
APP PUB NO 20150301078A1
SERIAL NO

14552399

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Abstract

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A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.

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Patent Owner(s)

Patent OwnerAddress
DCG SYSTEMS INC45900 NORTHPORT LOOP EAST FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berkmyre, Mike Allen, US 7 42
Pryadkin, Sergiy Plano, US 9 64
Sanders, John Coppell, US 39 305
Stallcup, Richard Frisco, US 7 38
Ukraintsev, Vladimir A Allen, US 11 50

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