DEPOSITION DEVICE WITH AUXILIARY INJECTORS FOR INJECTING NUCLEOPHILE GAS AND SEPARATION GAS
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United States of America Patent
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Issued Date -
Oct 22, 2015
app pub date -
Apr 16, 2015
filing date -
Apr 21, 2014
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Abstract
Embodiments relate to a deposition device for depositing one or more layers of material onto a surface of a substrate using an injector module assembly according to a relative movement between the injector module assembly and the substrate. The injector module assembly injects different gases through auxiliary gas injectors of the injector module assembly onto the surface of the substrate depending on the direction of relative movement between the injector module assembly and the substrate to improve the deposition rate. A first auxiliary gas injector injects nucleophile gas and a second auxiliary gas injector injects separation gas while the injector module assembly and the substrate makes a relative movement in one direction. When the injector module assembly and the substrate makes a relative movement in the opposite direction, the first auxiliary gas injector injects the separation gas and the second auxiliary gas injector injects the nucleophile gas.
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