ELECTROSTATIC CHUCK AND POWER SUPPLY SYSTEM
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United States of America Patent
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Issued Date -
Oct 15, 2015
app pub date -
Sep 24, 2013
filing date -
Nov 22, 2012
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Abstract
In an electrostatic chuck and a power supply system, high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electrostatic chuck is simplified. This power supply system includes: an electrostatic chuck (2) having a booster circuit (3); and an electric contact mechanism (4). Terminals (31a, 32a) of the booster circuit (3) are exposed to the outside. The terminals (31b, 32b) are connected to an attraction electrode (23). The electric contact mechanism (4) is configured from rails (41, 42), and flexible contacts (43, 44) in contact with the rails. The rails (41, 42) are connected to an external power supply (40), and the flexible contacts (43, 44) are provided on conductive plates (45, 46) of the electrostatic chuck (2). The conductive plates (45, 46) are connected to the terminals (31a, 32a) of the booster circuit (3).
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