Calibration of a mechanical property of SPM cantilevers
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United States of America Patent
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May 3, 2016
Grant Date -
Oct 15, 2015
app pub date -
Mar 22, 2013
filing date -
Apr 2, 2012
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Abstract
A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer having a mutually different thermal expansion coefficient, the method comprising the steps of: controllably causing a temperature distribution along the cantilever, measuring a spatial state of the cantilever, computing a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented.
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