INSPECTION DEVICE AND INSPECTION METHOD
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Oct 15, 2015
app pub date -
Oct 23, 2013
filing date -
Oct 31, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
To provide a technique for improving a detection precision of the inspection device. The inspection device 100 includes an irradiation unit 101 that irradiates a beam by pulse oscillation onto a surface of the sample from a laser light source, a detection unit 102 on which light from the surface of the sample by the irradiation is made incident to generate and output a detection signal, and a detection control unit 104 that generates a gate signal (G) for controlling an input/output of the detection unit 102 in synchronization with a timing of the pulse oscillation of the irradiation unit 101, and applies the gate signal (G) to the detection unit 102. The detection unit 102 allows the light to be made incident thereon at a timing in accordance with the gate signal (G), and generates and outputs a detection signal.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully