DEPOSITION SYSTEMS HAVING INTERCHANGEABLE GAS INJECTORS AND RELATED METHODS
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United States of America Patent
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Oct 15, 2015
app pub date -
Nov 20, 2013
filing date -
Nov 27, 2012
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Abstract
A deposition system includes two or more gas injectors that may be interchangeably used in a chamber of the deposition system. Each of the gas injectors may be configured to generate a sheet of flowing gas over a substrate support structure. The sheets may have differing widths, such that the gas injectors may be used with substrates having different diameters, which may enable use of the system with different substrates while maintaining efficient use of precursor gas. A method of forming such a deposition system includes forming and configuring such gas injectors to be interchangeably used at a common location within the deposition chamber. A method of using such a deposition system includes using two or more such gas injectors to deposit material on substrates having different sizes.
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