SEMICONDUCTOR STRUCTURE
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United States of America Patent
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Issued Date -
Oct 8, 2015
app pub date -
Sep 30, 2014
filing date -
Apr 3, 2014
priority date (Note) -
Abandoned
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Abstract
A semiconductor structure comprising a substrate, a drift layer, at least a doping region, an epitaxial channel, a gate oxide layer, a gate metal and an isolation layer is provided. The drift layer is disposed on the substrate. The doping region comprises a p-well region, an n+ region and a p+ region, wherein the n+ region and a portion of p+ region are disposed in the p-well region which is adjacent to the n+ region. The epitaxial channel is disposed over the drift layer and covers at least a portion of the n+ region. The epitaxial channel is composed of at least two epitaxial layers whose conduction types or doping concentrations are not identical. The gate oxide layer is disposed on the epitaxial channel. The gate metal is disposed on the gate oxide layer. The isolation layer is disposed on the gate metal and the gate oxide layer.
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