PLANT FOR PRODUCING TRISILYLAMINE IN THE GAS PHASE
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United States of America Patent
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app pub date -
Jun 19, 2015
filing date -
May 17, 2011
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Abandoned
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Abstract
A plant for preparing trisilylamine in the gas phase is provided. The plant includes a reactor (1) suitable for the reaction of at least the starting materials ammonia and monohalosilane in the gas phase; a precipitation vessel (2) downstream of the reactor (1); and a mixer (3) suitable for producing a homogeneous gas mixture containing at least the starting materials ammonia and monohalosilane upstream of the reactor (1). The mixer (3), reactor (1) and precipitation vessel (2) are connected to one another structurally in such a way that a continuous gas flow through the plant is ensured, with the gas flow optionally being able to be interrupted at one or more suitable points within the plant.
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