DIFFUSER HEAD APPARATUS AND METHOD OF GAS DISTRIBUTION
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Apr 1, 2014
filing date -
Apr 1, 2014
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Abandoned
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Abstract
An apparatus and method of forming a top contact layer of a thin film solar cell with improved layer thickness uniformity. Apparatus comprises a diffusion head for introduction of a processing gas into a chamber. The diffusion head includes a diffusion plate with a plurality of openings, each opening having a first cylindrical portion and a second conical-frustum portion.
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