Imaging a Sample with Multiple Beams and Multiple Detectors
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Mar 25, 2015
filing date -
Mar 25, 2014
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Abandoned
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Abstract
A multi-beam apparatus for inspecting or processing a sample with a multitude of focused beams uses a multitude of detectors for detecting secondary radiation emitted by the sample when is irradiated by the multitude of beams. Each detector signal comprises information caused by multiple beams, the apparatus equipped with a programmable controller for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam. The weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.
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