DISTRIBUTED ELECTROSTATIC ACTUATOR FOR MEMS DEVICES
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Mar 28, 2014
filing date -
Mar 28, 2014
priority date (Note) -
Abandoned
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Abstract
This disclosure provides systems, methods and apparatus for shutter-based EMS light modulators controlled by electrode actuators that include a compliant inner beam electrode positioned between a movable beam electrode and a fixed beam electrode. A first voltage is applied to the movable beam electrode, and a sufficiently different voltage is applied to one of the compliant beam electrode and the fixed outer beam electrode. During actuation, the movable beam electrode is drawn towards the compliant inner beam electrode, while the combination of the movable beam electrode and the compliant inner beam electrode are further drawn to the fixed beam electrode.
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