TEST APPARATUS AND CIRCUIT SUBSTRATE UNIT
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United States of America Patent
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N/A
Issued Date -
Oct 1, 2015
app pub date -
Mar 26, 2014
filing date -
Mar 26, 2014
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A test apparatus that tests a device under test, comprising first and second test substrates facing each other; test circuits provided respectively on a first substrate surface of the first test substrate facing the second test substrate and a second substrate surface of the second test substrate facing the first test substrate; a first cooling section provided on the first substrate surface of the first test substrate to house the test circuit and to have a cooling medium introduced therein; and a second cooling section provided on the second substrate surface of the second test substrate to house the test circuit and to have a cooling medium introduced therein. The first and second cooling sections include respective contact portions in contact with each other, and each contact portion has a connection opening that connects inside of the first cooling section and inside of the second cooling section to each other.
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