X-ray transmission inspection apparatus
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United States of America Patent
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Jan 9, 2018
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app pub date -
Mar 31, 2015
filing date -
Mar 31, 2014
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Abstract
An X-ray transmission inspection apparatus includes: an X-ray source configured to irradiate a sample with an X-ray; a detector configured to be disposed on a side opposite to the X-ray source with respect to the sample and to detect the X-ray which is transmitted through the sample using a phosphor; a shield member configured to be arranged to face a detection surface of the detector and to block a part of X-rays to partially form a shield area from the X-rays on the detection surface; and a shield moving mechanism configured to move the shield member relative to the detector to enable change of a position of the shield area.
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