DEVICE AND METHOD FOR COATING SUBSTRATES
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Sep 25, 2013
filing date -
Sep 28, 2012
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Abstract
Various embodiments may relate to a device for coating substrates. The device includes a reaction space element configured to arrange substrate portions of one or more substrates as opposite outer walls of a reaction space, and a material feed element configured to introduce one or more materials into the reaction space for coating surfaces of the substrate portions which are opposite one another in the reaction space. Various embodiments further relate to a method for coating substrates.
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