Atomic Layer Deposition Using Injector Module Arrays
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Mar 20, 2015
filing date -
Mar 27, 2014
priority date (Note) -
Abandoned
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Abstract
An atomic layer deposition (ALD) device includes an array of a plurality of injector modules configured in a plane parallel to a substrate. The plurality of injector modules that form the array are, in some embodiments, configured in a regular array such as in a matrix of columns and/or rows of injector modules. In other embodiments of the array, the injector modules are configured in a periodic pattern. Each of the injector modules of the array injects both source precursor and reactant precursor onto the substrate.
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