SEMICONDUCTOR DEVICE
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United States of America Patent
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Issued Date -
Sep 24, 2015
app pub date -
Mar 13, 2015
filing date -
Mar 24, 2014
priority date (Note) -
Abandoned
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Abstract
A semiconductor device is provided, comprising a semiconductor base of a first conductivity type having a main surface, an element region arranged in the main surface; and a peripheral region surrounding the element region, the peripheral region comprising a field limiting ring region including a peripheral semiconductor region of a second conductivity type surrounding the element region in the main surface of the semiconductor base, the field limiting ring region including a groove formed in the peripheral semiconductor region, the groove extending in a film-thickness direction from an upper surface of the peripheral semiconductor region. As seen along a direction from the element region toward an outer edge of the peripheral region, a center position of the groove is closer to the element region than a center position of the peripheral semiconductor region.
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