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United States of America Patent

APP PUB NO 20150270150A1
SERIAL NO

14665136

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A boat for loading a plurality of substrates to be vertically stacked includes a ring holder for supporting a bottom part of each substrate and mounting the substrate, and a plurality of support rods for supporting a bottom part of the ring holder and having first ends to mount the ring holder, wherein the ring holder and the support rods are integrally connected to each other within a projected area of the substrates.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
TERASEMICON CORPORATION164-5 JANGJI-RI DONGTAN-MYEON HWASEONG-SI GYEONGGI-DO 445-812

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHOI, Woo Yong Osan-si, KR 22 170
YOO, Han Kil Osan-si, KR 1 0

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