Liquid Chemical for Forming Protective Film
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United States of America Patent
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app pub date -
Sep 12, 2013
filing date -
Sep 25, 2012
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Abstract
A liquid chemical for forming a water-repellent protective film, containing: a water-repellent protective film forming agent for forming a water-repellent protective film on a wafer having at its surface an uneven pattern and containing at least one kind of element selected from titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium at surfaces of recessed portions of the uneven pattern, the protective film being formed at least on the surfaces of the recessed portions by retaining the liquid chemical at least on the recessed portions of the wafer before a rinsing treatment step of rinsing the wafer surface with a rinsing liquid consisting only of a protic polar solvent or a rinsing liquid containing a protic polar solvent as the principal component; and a solvent. The water-repellent protective film forming agent is at least one kind of compound represented by the following general formulas [1] to [3].
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