Method and Apparatus for Generating Radiation

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United States of America Patent

APP PUB NO 20150264791A1
SERIAL NO

14418366

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Abstract

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A method for generating radiation. Directing a first body from a first location. Directing a second body from a second, different location. The first body and second body being used to form a target at a plasma formation location. At least one of the first body and second body comprising a fuel for use in generating a radiation generating plasma. Directing initiating radiation at the target at the plasma formation location to generate a radiation generating plasma from the target.

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Patent Owner(s)

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ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

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  • 2013 Application Filing Year
  • H05G Class
  • 213 Applications Filed
  • 180 Patents Issued To-Date
  • 84.51 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20132014201520162017201820190255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dijksman, Frederik Weert, NL 1 9
Nikipelov, Andrey Eindhoven, NL 30 43
Yakunin, Mikhailovich Mierlo, NL 1 9

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Patent Citation Ranking

  • 9 Citation Count
  • H05G Class
  • 5.79 % this patent is cited more than
  • 10 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges7733153201 - 1011 - 2021 - 3031 - 4041 - 5005101520253035404550556065707580

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