Method and Apparatus for Generating Radiation
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United States of America Patent
Stats
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N/A
Issued Date -
Sep 17, 2015
app pub date -
Jul 5, 2013
filing date -
Aug 1, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for generating radiation. Directing a first body from a first location. Directing a second body from a second, different location. The first body and second body being used to form a target at a plasma formation location. At least one of the first body and second body comprising a fuel for use in generating a radiation generating plasma. Directing initiating radiation at the target at the plasma formation location to generate a radiation generating plasma from the target.
First Claim
all claims..Other Claims data not available
Family
Country | kind | publication No. | Filing Date | Type | Sub-Type |
---|---|---|---|---|---|
JP | A | JP2015528994 | Jul 05, 2013 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
Published unexamined patent application | 放射を発生させるための方法及び装置 | Oct 01, 2015 | |||
WO | A1 | WO2014019803 | Jul 05, 2013 | Patent | Application |
Type : Patent Sub-Type : Application | |||||
INTERNATIONAL APPLICATION PUBLISHED WITH INTERNATIONAL SEARCH REPORT | METHOD AND APPARATUS FOR GENERATING RADIATION | Feb 06, 2014 |
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
ASML NETHERLANDS B V | P O BOX 324 VELDHOVEN 5500 AH |
International Classification(s)

- 2013 Application Filing Year
- H05G Class
- 213 Applications Filed
- 180 Patents Issued To-Date
- 84.51 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Dijksman, Frederik | Weert, NL | 1 | 9 |
# of filed Patents : 1 Total Citations : 9 | |||
Nikipelov, Andrey | Eindhoven, NL | 30 | 43 |
# of filed Patents : 30 Total Citations : 43 | |||
Yakunin, Mikhailovich | Mierlo, NL | 1 | 9 |
# of filed Patents : 1 Total Citations : 9 |
Cited Art Landscape
- No Cited Art to Display

Patent Citation Ranking
- 9 Citation Count
- H05G Class
- 5.79 % this patent is cited more than
- 10 Age
Forward Cite Landscape
- No Forward Cites to Display

Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|---|---|---|---|
11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Mar 17, 2027 |
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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