MEMS MICROPHONE WITH SPRINGS AND INTERIOR SUPPORT
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United States of America Patent
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app pub date -
May 29, 2015
filing date -
Jan 11, 2012
priority date (Note) -
Abandoned
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Abstract
A MEMS microphone has a stationary portion with a backplate having a plurality of apertures, and a diaphragm spaced from the backplate and having an outer periphery. As a condenser microphone, the diaphragm and backplate form a variable capacitor. The microphone also has a post extending between, and substantially permanently connected with, both the backplate and the diaphragm, and a set of springs securing the diaphragm to at least one of the post and the stationary portion. The post is positioned to be radially inward of the outer periphery of the diaphragm.
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