MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS
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United States of America Patent
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Issued Date -
Sep 17, 2015
app pub date -
Mar 13, 2015
filing date -
Mar 13, 2014
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Abstract
A compact electromagnetic system is disclosed that is capable of scanning an ion beam in two orthogonal directions (e.g., for semiconductor doping or hydrogen induced exfoliation). In particular, according to embodiments of the compact electromagnetic system, the steel yoke, pole pieces, and excitation coils for both the X and Y axis have been integrated into a common structure.
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