CLEANING APPARATUS AND PROCESS FOR CLEANING ELECTRONIC COMPONENTS
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United States of America Patent
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Issued Date -
Sep 17, 2015
app pub date -
Mar 15, 2014
filing date -
Mar 15, 2014
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Abstract
Cleaning apparatuses for cleaning electronic components such as camera modules and electronics substrates are provided. The cleaning apparatuses have a plurality of processing zones and one or more conveyors for conveying an electronic component to each processing zone sequentially such that the electronic component is processed in-line by the processing zones. In one aspect, plasma is applied to the electronic component at atmospheric pressure at one of the processing zones. In another aspect, there is a plurality of separately controlled conveyors, and the electronic component is processed at each processing zone over a respective processing time, with at least one of the processing times being different to the other processing times.
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