METHOD FOR MEASURING SURFACE POTENTIALS ON POLARIZED DEVICES
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United States of America Patent
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Sep 10, 2015
app pub date -
Sep 18, 2013
filing date -
Sep 18, 2012
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Abstract
A method for measuring the surface potential of a polarized sample includes: measuring the topographic profile of the sample by scanning its surface with a tapered tip connected to a micro-lever activated at the resonance frequency of same by a piezoelectric actuator; placing the tapered tip a constant distance away from the topographic profile of the surface obtained during the previous step; and measuring the electrostatic potential of the surface. The sample is not polarized during the step of measuring the topographic profile. The sample is polarized during the measurement of the potential profile.
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