POLISHING METHOD AND METHOD FOR PRODUCING ALLOY MATERIAL

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United States of America Patent

APP PUB NO 20150251293A1
SERIAL NO

14432905

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The polishing method polishes an alloy material using a polishing pad and a polishing composition supplied to the polishing pad. The polishing composition contains an abrasive of silica or alumina, and a surface temperature of the polishing pad at the end of polishing is 20° C. or below. The method for producing an alloy material comprises a polishing step of polishing an alloy material using a polishing pad and a polishing composition supplied to the polishing pad. The polishing composition contains an abrasive of silica or alumina, and a surface temperature of the polishing pad at the end of polishing is 20° C. or below.

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Patent OwnerAddress
FUJIMI INCORPORATEDKIYOSU-SHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asai, Maiko Kiyosu-shi, JP 18 26
Morinaga, Hitoshi Kiyosu-shi, JP 68 521
Niwano, Yutaka Kiyosu-shi, JP 4 9
Tamai, Kazusei Kiyosu-shi, JP 43 339

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