Radio-frequency power unit

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United States of America Patent

PATENT NO 10327322
APP PUB NO 20150250046A1
SERIAL NO

14635152

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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PROBLEM: To improve the stability of the process of the plasma ignition, by allowing a high current to pass through an induction coil without increasing the power-supply voltage in the process of the plasma ignition.

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Patent Owner(s)

Patent OwnerAddress
SHIMADZU CORPORATIONKYOTO-SHI KYOTO 604-8511

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Habu, Toshiya Kyoto, JP 17 118

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