Laser chamber and discharge excitation gas laser apparatus
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United States of America Patent
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Jun 21, 2016
Grant Date -
Sep 3, 2015
app pub date -
Apr 23, 2015
filing date -
Nov 5, 2012
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Abstract
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
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