Oxide sintered body and sputtering target, and method for producing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 2, 2018
Grant Date -
Sep 3, 2015
app pub date -
Sep 10, 2013
filing date -
Sep 14, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An oxide sintered body which is obtained by mixing and sintering zinc oxide, indium oxide, gallium oxide and tin oxide. The relative density of the oxide sintered body is 85% or more and the average grain size of crystal grains observed on the surface of the oxide sintered body is less than 10 μm. X-ray diffraction of the oxide sintered body shows that a Zn2SnO4 phase and an InGaZnO4 phase are the main phases and that an InGaZn2O5 phase is contained in an amount of 3 volume % or less.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully