Energy-discrimination detection device
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United States of America Patent
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Aug 25, 2015
Grant Date -
Sep 3, 2015
app pub date -
Jan 29, 2015
filing date -
Mar 25, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.
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