Aberration corrector and charged particle beam apparatus using the same
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United States of America Patent
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Mar 15, 2016
Grant Date -
Sep 3, 2015
app pub date -
Jan 28, 2015
filing date -
Feb 28, 2014
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Abstract
Provided are an aberration corrector that reduces irregularity of a magnetic field of a multipole to obtain an image of high resolution and a charged particle beam apparatus using the same. The aberration corrector includes a plurality of magnetic field type poles, a ring that magnetically connects the plurality of poles with one another and an adjustment member disposed between the pole and the ring to adjust a spacing between the pole and the ring per pole.
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