DETERMINATION METHOD, EXPOSURE APPARATUS, EXPOSURE SYSTEM, METHOD OF MANUFACTURING ARTICLE, AND STORAGE MEDIUM
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United States of America Patent
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Issued Date -
Sep 3, 2015
app pub date -
Feb 25, 2015
filing date -
Mar 3, 2014
priority date (Note) -
Abandoned
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Abstract
The present invention provides a determination method of determining an order when an exposure apparatus performs a plurality of exposure processing operations sequentially, the method comprising obtaining a first standby time required until a first exposure processing out of the plurality of exposure processing operations is ready to start, obtaining a second standby time required until a second exposure processing out of the plurality of exposure processing operations is ready to start; and determining the order to perform the first exposure processing before the second exposure processing in a case where the first standby time is shorter than the second standby time, and to perform the first exposure processing after the second exposure processing in a case where the first standby time is longer than the second standby time.
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