Illumination optical apparatus and projection exposure apparatus
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United States of America Patent
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Aug 23, 2016
Grant Date -
Sep 3, 2015
app pub date -
May 15, 2015
filing date -
Oct 28, 2003
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Abstract
An illumination optical apparatus illuminates an object with illumination light. The apparatus includes a birefringent member having different thicknesses of a birefringent material at different incidence positions such that illumination light incident on the birefringent member in a first linear polarization state having a single polarization direction is in a second linear polarization state on a pupil plane, the second linear polarization state having a polarization direction being substantially coincident with a circumferential direction about an optical axis of the illumination optical apparatus.
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