Photoresist composition, compound and process of producing photoresist pattern

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United States of America Patent

PATENT NO 9563123
SERIAL NO

14635718

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Abstract

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A photoresist composition comprising:

    a resin having an acid-labile group,an acid generator, anda compound represented by formula (I):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO 103-6020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Shingo Osaka, JP 32 350
Ichikawa, Koji Osaka, JP 316 1995
Masuyama, Tatsuro Osaka, JP 69 357

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