ACCELERATION SENSOR
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United States of America Patent
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app pub date -
Mar 3, 2014
filing date -
Mar 3, 2014
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Abstract
Various acceleration sensors are disclosed. In some cases, an inertial mass may be formed during back-end-of-line (BEOL). In other cases, a membrane may have a bent, undulated or winded shape. In yet other embodiments, an inertial mass may span two or more pressure sensing structures.
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