ANGULAR ACCELERATION SENSOR
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United States of America Patent
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app pub date -
May 18, 2015
filing date -
Nov 19, 2012
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Abstract
An angular acceleration sensor includes a flat plate surface, a fixed portion, a weight portion, and a beam portion. The weight portion includes a recessed portion that is recessed in an X-axis negative direction in the flat plate surface. The fixed portion includes a projecting portion projecting in the X-axis negative direction in the flat plate surface to be opposed to the recessed portion, and a slit extending inward in an X-axis positive direction from a position adjacent to the projecting portion. The beam portion extends along the Y-axis in the flat plate surface, is connected between the recessed portion and the projecting portion, and supports the weight portion movably relative to the fixed portion.
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